Calibration of Plume Diagnostics

The ion current density is measured by a flat probe at the EA placement is 0.5-1.0 mA/cm2. The diameter of the visible area of EA is around 3.0cm.

Parameters of a 3.0cm ion source

  • Ion energy 50-1000 eV
  • Gases: Argon and Xenon
  • Gas flow 1-10 sccm
  • Max ion current: 100mA

  • Experiments in a 0.4 m3 vacuum vessel

  • Pumping speed 1500 l/s (Xe)
  • Background pressure:
  • For Xe: 0.8-1.6×10-5
  • For Ar: 2.0-2.5×10-5