Calibration of Plume Diagnostics

    

 

Parameters of a 3 cm ion source:

         Ion energy 50-1000 eV;

         Gas: Argon, Xenon

         Gas flow 1-10 sccm;

         Max ion current :  100 mA

Experiments in a 0.4 m3 vacuum vessel:

         Pumping speed 1500 l/s (Xe)

         Background pressure:

   For Xe: 0.8 –1.6·10-5 torr

   For Ar: 2-2.5 ·10-5 torr

 

        Ion current density measured by a flat probe at the EA placement: 0.5-1 mA/cm2

        Diameter of the visible area of EA > 3 cm

 

 

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