Calibration of Plume Diagnostics
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Parameters of a 3 cm ion source: • Ion energy 50-1000 eV; • Gas: Argon, Xenon • Gas flow 1-10 sccm; • Max ion current : 100 mA Experiments in a 0.4 m3 vacuum vessel: • Pumping speed 1500 l/s (Xe) • Background pressure: For Xe: 0.8 –1.6·10-5 torr For Ar: 2-2.5 ·10-5 torr
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• Ion current density measured by a flat probe at the EA placement: 0.5-1 mA/cm2 • Diameter of the visible area of EA > 3 cm |
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